Demonstration of Doubly Rotated X-Cut Quartz Plate Oscillators with a Slot Vibrating in Length Extensional Mode

被引:0
|
作者
Yamaguchi, Tomiharu [1 ]
Katakura, Kiyoto [1 ]
Todo, Yusuke [1 ]
Kanie, Hisashi [1 ]
机构
[1] Tokyo Univ Sci, Dept Appl Elect, Tokyo 162, Japan
关键词
quartz oscillator; X-cut; length extensional mode; slot structure; wet etching; RESONATOR;
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
This paper describes the finite element method analysis of (XYlt) -35 degrees/-1 degrees rotated X-cut quartz oscillators vibrating in the length-extensional mode and the experimental data of the sample processed monolithically by the wet etching. The oscillator consists of the resonator with a slot and an integral mounting system and has the first order temperature frequency coefficient alpha = -0.6 x10(-6) /degrees C, the second order temperature frequency coefficient beta = -3.5 x10(-8) /degrees C-2, and the parameters of the electrical equivalent circuit in the air: the series inductance L-1 = 2.70 H, the capacitance ratio r = 192, the series resistance R-1 = 1080 O, and Q = 19000.
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页码:726 / 728
页数:3
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