Excimer lasers as tools for material processing in manufacturing

被引：0
|
作者：
Endert, H [1 ]
机构：
[1] LAMBDA PHYS GMBH,D-37079 GOTTINGEN,GERMANY
来源：
IEEE/LEOS 1996 SUMMER TOPICAL MEETINGS - ADVANCED APPLICATIONS OF LASERS IN MATERIALS AND PROCESSING, DIGEST | 1996年
关键词：
D O I：
10.1109/LEOSST.1996.540664
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：28 / 29
页数：2
相关论文
共 50 条
  • [1] Excimer lasers in manufacturing
    Endert, H
    Patzel, R
    Stamm, U
    Basting, D
    [J]. LASERS AS TOOLS FOR MANUFACTURING II, 1997, 2993 : 46 - 53
  • [2] Femtosecond lasers: Powerful tools for clean material processing
    Laporte, P
    Audouard, E
    Garrelie, F
    [J]. HIGH-POWER LASER ABLATION IV, PTS 1 AND 2, 2002, 4760 : 347 - 359
  • [3] SEMICONDUCTOR PROCESSING WITH EXCIMER LASERS
    YOUNG, RT
    NARAYAN, J
    CHRISTIE, WH
    VANDERLEEDEN, GA
    LEVATTER, JI
    CHENG, LJ
    [J]. SOLID STATE TECHNOLOGY, 1983, 26 (11) : 183 - 189
  • [4] SEMICONDUCTOR PROCESSING WITH EXCIMER LASERS
    YOUNG, RT
    NARAYAN, J
    CHRISTIE, WH
    VANDERLEEDEN, GA
    ROTHE, DE
    CHENG, LJ
    [J]. AIP CONFERENCE PROCEEDINGS, 1983, (100) : 266 - 278
  • [5] EXCIMER LASERS TACKLE PROCESSING
    HELZER, P
    [J]. PHOTONICS SPECTRA, 1989, 23 (01) : 112 - &
  • [6] MATERIAL PROCESSING BY EXCIMER LASER
    KAHLERT, HJ
    SOWADA, U
    BASTING, D
    [J]. F&M-FEINWERKTECHNIK & MESSTECHNIK, 1988, 96 (7-8): : 298 - &
  • [7] Lasers for material processing
    Nichici, A
    David, I
    Cicala, E
    [J]. FIFTH CONFERENCE ON OPTICS (ROMOPTO '97), PTS 1 AND 2, 1998, 3405 : 246 - 251
  • [8] LASERS IN MATERIAL PROCESSING
    SIVAKUMAR, R
    [J]. TRANSACTIONS OF THE INDIAN INSTITUTE OF METALS, 1990, 43 (04): : 228 - 249
  • [9] Lasers in material processing
    Loosen, P
    [J]. ADVANCES IN LASERS AND APPLICATIONS, 1999, 52 : 287 - 317
  • [10] EXCIMER LASERS - AN EMERGING TECHNOLOGY IN MATERIALS PROCESSING
    ZNOTINS, TA
    POULIN, D
    REID, J
    [J]. LASER FOCUS-ELECTRO-OPTICS, 1987, 23 (05): : 54 - &
12345