Piezoelectric sensors using rubber sensing film

被引:0
|
作者
Hohkawa, K
Kaneko, A
Koh, K
Suzuki, H
Komine, K
Eguchi, T
机构
[1] Kanagawa Inst Technol, Dept Elect & Elect Engn, Atsugi, Kanagawa 24302, Japan
[2] Meidensha Corp, Adv Technol Res Lab, Tokyo 141, Japan
关键词
sensors; quartz crystal microbalance; surface acoustic wave; rubber material; 1,2 polybutadiene; polymer; phase; attenuation;
D O I
10.1143/JJAP.37.2836
中图分类号
O59 [应用物理学];
学科分类号
摘要
Piezoelectric sensors, consisting of multiple-crystal oscillators or surface acoustic wave (SAW) devices, are effectively used as highly functional and highly sensitive chemical sensors which identify unknown or target materials in gasses and liquids. We present the results of a basic study on applying rubber materials as the sensing films of the piezoelectric sensors and a simple method of preparing crystals with sensing films of various characteristics. We verified the Feasibility of the materials used as sensing films of the piezoelectric sensors. We made several films with different adhesive natures by bonding reactive materials on the surface of the rubber films instead of preparing various kinds of monomers. We also present the results of the basic characteristics of SAW sensors with rubber films.
引用
收藏
页码:2836 / 2841
页数:6
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