In this study, we have investigated the effect of Mn addition on texture, phase formation, and magnetic properties of L1(0) FePt thin films. FePt/Mn/FePt trilayers were processed by rapid thermal annealing in the temperature range of 650 -800 degrees C for 30 s in N-2 atmosphere. It is shown that Mn addition up to 10 at.% supports L1(0)(001)-texture formation resulting in large perpendicular magnetic anisotropy. However, it is observed that Mn is only partially incorporated into the FePt lattice. It was found that Mn diffuses through the FePt top layer to the sample surface, promoting the ordering process and forming a Mn oxide layer.