Experimental investigation of the effect of defocus on beam diameter in focused ion beam milling

被引：0
|
作者：
Campbell, LCI [1 ]
Humphreys, CJ [1 ]
机构：
[1] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
来源：
ELECTRON MICROSCOPY 1998, VOL 3: MATERIALS SCIENCE 2 | 1998年
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：157 / 158
页数：2
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