Pneumatically-actuated tunable microlens for endoscopic optical coherence tomography

被引：0

作者：

Aljasem, Khaled ^{[1
]}

Werber, Armin ^{[1
]}

Reichelt, Stephan ^{[1
]}

Mader, Daniel ^{[1
]}

Zappe, Hans ^{[1
]}

机构：

[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Freiburg, Germany

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

micro-lens; polydimethylsiloxane; micro-optics; optical coherence tomography;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A pneumatically-actuated micro-lens integrated in the sample arm of a time-domain optical coherence tomography (OCT) system is presented. A 50 gm thick polydimethylsiloxane (PDMS) membrane is spun onto the front side of the lens. Deep-reactive ion-etching (DRIE) is applied to create the aperture of the lens. Dynamically shifting the focal length for each A-scan step enhances the axial scan length and the contrast of the backscattered interference signal of the structures beneath the surface. The successful integration of the micro-lens with an OCT system allows its use in endoscopic in-vivo applications.

引用

页数：2

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