Characterization and imaging of nanostructured materials using tabletop extreme ultraviolet light sources

被引：0

作者：

Karl, Robert, Jr. ^{[1
]}

Knobloch, Joshua ^{[1
]}

Frazer, Travis ^{[1
]}

Tanksalvala, Michael ^{[1
]}

Porter, Christina ^{[1
]}

Bevis, Charles ^{[1
]}

Chao, Weilun ^{[2
]}

Mayor, Begona Abad ^{[1
]}

Adams, Daniel ^{[1
]}

Mancini, Giulia ^{[1
]}

Hernandez-Charpak, Jorge N. ^{[1
]}

Kapteyn, Henry ^{[1
]}

Murnane, Margaret ^{[1
]}

机构：

[1] Univ Colorado, JILA, 440 UCB, Boulder, CO 80309 USA

[2] Lawrence Berkeley Natl Lab, Ctr Xray Opt, Berkeley, CA 94720 USA

来源：

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXII | 2018年 / 10585卷

关键词：

Ultrafast x-rays; nanometrology; ultrathin films; nano-mechanical properties; coherent diffractive imaging; ptychography; photoacoustic;

D O I：

10.1117/12.2297223

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Using a tabletop coherent extreme ultraviolet source, we extend current nanoscale metrology capabilities with applications spanning from new models of nanoscale transport and materials, to nanoscale device fabrication. We measure the ultrafast dynamics of acoustic waves in materials; by analyzing the material's response, we can extract elastic properties of films as thin as 11nm. We extend this capability to a spatially resolved imaging modality by using coherent diffractive imaging to image the acoustic waves in nanostructures as they propagate. This will allow for spatially resolved characterization of the elastic properties of non-isotropic materials.

引用

页数：4

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