Film thickness dependence, on frequency-temperature characteristics for AT-cut bar resonators

被引：0

作者：

Nakazawa, M ^{[1
]}

Yamamoto, F ^{[1
]}

Sawai, D ^{[1
]}

Kadosaki, K ^{[1
]}

机构：

[1] Shinshu Univ, Matsumoto, Nagano, Japan

来源：

PROCEEDINGS OF THE 1998 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM | 1998年

关键词：

D O I：

10.1109/FREQ.1998.718017

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Analysis and experimental results regarding frequency-temperature vs. electrode film thickness characteristics for AT-cut bar resonators are de scribed. Quadric relationship between frequency turn-over temperature and electrode film thickness for AT-cut bar resonators was obtained theoretically. A new electrical equivalent model for film thickness of AT-cut resonator was proposed and equivalent model was experimentally confirmed.

引用

页码：968 / 974

页数：7

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