The effect of AlN underlayer on c-axis orientation of barium ferrite thin films for perpendicular magnetic recording media

被引:5
|
作者
Kakizaki, K [1 ]
Watanabe, H [1 ]
Hiratsuka, N [1 ]
机构
[1] Saitama Univ, Grad Sch Sci & Engn, Urawa, Saitama 3388570, Japan
关键词
thin films; underlayer; magnetic recording media; c-axis orientation;
D O I
10.1016/S0304-8853(01)00331-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effect of AIN underlayer on c-axis orientation of barium ferrite thin films and their magnetic properties have been investigated. On the AIN underlayer with a thickness of 30 nm, barium ferrite film with a thickness of 50 nm was deposited at room temperature. As the deposited barium ferrite film was not crystallized, it was post-annealed at 800 degreesC for 5 h in air. The c-axis of crystallized barium ferrite was oriented perpendicular to the film surface that was caused by the effect of the AIN underlayer. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:169 / 173
页数:5
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