Photoluminescence of oxidized porous silicon under UV-light illumination

被引:26
|
作者
Zhao, Y
Yang, DR [1 ]
Li, DS
Jiang, MH
机构
[1] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Peoples R China
[2] Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Peoples R China
基金
中国国家自然科学基金;
关键词
blue emission; PECVD method; porous silicon; oxidation;
D O I
10.1016/j.mseb.2004.08.014
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The blue emission resulting from the as-prepared and oxidized porous silicon (PS) was reported in this paper. After the oxidation in plasma enhanced chemical vapor deposition (PECVD) process, the blue emission intensity in photoluminescence (PL) spectra increased because it is believed that the blue emission came from defects in silicon dioxides. Under UV-light illumination, the stability of the blue emission of the N-type oxidized PS was improved due to oxidation. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:95 / 98
页数:4
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