The deep-saturation study of drain current in SOI MOSFET's transfer characteristics

被引:3
|
作者
Yue, H [1 ]
Zhu, JG
Guo, L
Zhang, ZF
机构
[1] Xidian Univ, Inst Microelect, Xian 710071, Peoples R China
[2] Sichuan Inst Solid Circuits, Chongqin 400060, Peoples R China
关键词
SOI; deep-saturation; hot-carriers interface-trap;
D O I
10.7498/aps.50.120
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
In this work, the electric characteristics of SOI MOSFET are investigated. The deep-saturation of drain current in transfer character is found in many transistors. After applying the channel hot-carriers stress, the electric parameters degradation is very different from that of the normal transistors. It has been shown that the deep-saturation effect in NMOSFET disappears after stress, but in PMOS, this effect is not weakened by hot-carriers injection. The results are of importance for reliability designing and reliability strengthening of SOI devices.
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页码:120 / 125
页数:6
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