Structural, optical, and electrical properties of low-concentration Ga-doped CdO thin films by pulsed laser deposition

被引:19
|
作者
Li, Enzhu [1 ,2 ]
Zhuo, Huixian [1 ,2 ]
He, Hongcai [1 ,2 ]
Wang, Ning [1 ,2 ]
Liu, Tao [1 ,2 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
[2] Univ Elect Sci & Technol China, Sch Microelect & Solid State Elect, Chengdu 610054, Peoples R China
关键词
SPRAY-PYROLYSIS; OXIDE-FILMS; TRANSPARENT; CONDUCTORS; TRANSPORT;
D O I
10.1007/s10853-016-9998-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
CdO thin films with low Ga doping concentrations were deposited on low-cost glass substrates by pulsed laser deposition. The influence of Ga doping concentration on structural, electrical, and optical properties of CdO thin films was studied. The Ga-doped CdO thin films show decreasing plasma wavelength and resistivity when increasing doping concentration, and the widening optical gap varies from 2.49 to 2.85 eV with the Ga doping concentration increasing from 0.2 to 1.2 at% due to Moss-Burstein effect. When Ga doping concentration in CdO thin films was controlled at low level from 0.6 to 1.0 at%, the films achieved both high conductivity (similar to 10(-4) Omega.cm) and high transmittance up to the infrared region (>1600 nm), which demonstrates good potential as an ideal transparent conductor of full-spectrum photovoltaic devices.
引用
收藏
页码:7179 / 7185
页数:7
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