共 50 条
- [2] Optical properties of Al2O3 thin films grown by atomic layer deposition [J]. APPLIED OPTICS, 2009, 48 (28) : 5407 - 5412
- [4] Properties of Al2O3 thin films grown by atomic layer deposition [J]. NINTH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS, 2012, : 171 - 174
- [7] Characterization of Al2O3/GaAs interfaces and thin films prepared by atomic layer deposition [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2013, 31 (04):
- [8] Atomic layer deposition of Al2O3 thin films on diamond [J]. DIAMOND AND RELATED MATERIALS, 2005, 14 (11-12) : 2015 - 2018
- [10] Nanotribological Behavior of Ultra-thin Al2O3 Films Prepared by Atomic Layer Deposition [J]. Tribology Letters, 2014, 55 : 143 - 149