Charged Device Model (CDM) ESD Challenges for Laterally Diffused nMOS (nLDMOS) Silicon Controlled Rectifier (SCR) Devices for High-Voltage Applications in Standard Low-Voltage CMOS Technology
The turn-on behavior of high-voltage-tolerant nLDMOS SCRs is investigated during CDM ESD events. An early failure occurs because of gate-oxide damage. A device optimization is proposed, which improves the CDM ESD robustness up to 2.7x, unchanging the HBM ESD robustness.