Charged Device Model (CDM) ESD Challenges for Laterally Diffused nMOS (nLDMOS) Silicon Controlled Rectifier (SCR) Devices for High-Voltage Applications in Standard Low-Voltage CMOS Technology

被引:0
|
作者
Griffoni, A. [1 ]
Chen, S. -H. [1 ]
Thijs, S.
Linten, D.
Scholz, M. [2 ]
Groeseneken, G. [1 ]
机构
[1] Katholieke Univ Leuven, Dept Elect Engn, B-3001 Louvain, Belgium
[2] VU Brussels, Dept Elect Engn, B-1005 Brussels, Belgium
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The turn-on behavior of high-voltage-tolerant nLDMOS SCRs is investigated during CDM ESD events. An early failure occurs because of gate-oxide damage. A device optimization is proposed, which improves the CDM ESD robustness up to 2.7x, unchanging the HBM ESD robustness.
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页数:4
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