Dislocation Reduction by Glide in Epitaxial IV-VI Layers on Si Substrates

被引:3
|
作者
Zogg, H. [1 ]
机构
[1] ETH, Thin Film Phys Grp, CH-8005 Zurich, Switzerland
关键词
Molecular beam epitaxy; heteroepitaxy; dislocation reduction; lead chalcogenides; SI(111); DENSITIES; GAAS; CAF2;
D O I
10.1007/s11664-012-2031-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It is explained with a simple model why the reduction of threading dislocation (TD) densities in epitaxial lattice and thermal expansion mismatched IV-VI layers such as PbSe(111) on Si(111) substrates follows a 1/h (2) dependence where h is the thickness of the layer. This is in contrast to the 1/h dependence for III-V and II-VI layers grown on mismatched substrates. The 1/h (2) dependence results since the thermal mismatch strain is mainly reduced by glide and reactions of the TD in their main {100}-type glide system of the NaCl-type IV-VI semiconductors. In addition, multiple thermal cycles lead to further reduction of the TD densities by glide and fusion since fusion does not cause dislocation blocking.
引用
收藏
页码:1931 / 1935
页数:5
相关论文
共 50 条
  • [1] Dislocation Reduction by Glide in Epitaxial IV–VI Layers on Si Substrates
    H. Zogg
    Journal of Electronic Materials, 2012, 41 : 1931 - 1935
  • [2] STRAIN IN EPITAXIAL LAYERS OF IV-VI COMPOUNDS AND THEIR PSEUDOBINARY ALLOYS
    HOHNKE, DK
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1974, 19 (03): : 234 - 234
  • [3] The epitaxial growth of IV-VI heterostructures and superlattices on (001)Si
    Fedorenko, AI
    Fedorov, AG
    Sipatov, AY
    Mironov, OA
    THIN SOLID FILMS, 1995, 267 (1-2) : 134 - 137
  • [4] HETEROEPITAXIAL IV-VI INFRARED SENSORS ON Si-SUBSTRATES WITH FLUORIDE BUFFER LAYERS.
    Zogg, H.
    Vogt, W.
    Melchior, H.
    Nuclear instruments and methods in physics research, 1986, A253 (03): : 418 - 422
  • [5] HETEROEPITAXIAL IV-VI INFRARED-SENSORS ON SI-SUBSTRATES WITH FLUORIDE BUFFER LAYERS
    ZOGG, H
    VOGT, W
    MELCHIOR, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1987, 253 (03): : 418 - 422
  • [6] THE BARRIER TO MISFIT DISLOCATION GLIDE IN CONTINUOUS, STRAINED, EPITAXIAL LAYERS ON PATTERNED SUBSTRATES
    WATSON, GP
    AST, DG
    ANDERSON, TJ
    PATHANGEY, B
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (05) : 3103 - 3110
  • [8] Strain relaxation in IV-VI semiconductor layers grown on silicon (100) substrates
    Sachar, HK
    Mccann, PJ
    Fang, XM
    THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII, 1998, 505 : 185 - 190
  • [9] Faraday effect in epitaxial films of IV-VI semiconductors
    Herbst, W
    Pascher, H
    Bauer, G
    NARROW GAP SEMICONDUCTORS 1995, 1995, (144): : 140 - 144
  • [10] Facility for growing epitaxial films of IV-VI compounds
    Levchenko, VI
    Postnova, LI
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1995, 38 (06) : 794 - 796