Improvement of thermal stability of an organic pyroelectric infrared sensor with Parylene C coating

被引：1

作者：

Sutani, Yohei ^{[1
]}

Fukushima, Tatsuya ^{[1
]}

Mori, Akimitsu ^{[1
]}

Koshiba, Yasuko ^{[1
]}

Kodani, Tetsuhiro ^{[2
]}

Kanemura, Takashi ^{[2
]}

Ishida, Kenji ^{[1
]}

机构：

[1] Kobe Univ, Grad Sch Engn, Dept Chem Sci & Engn, Kobe, Hyogo 6578501, Japan

[2] Daikin Ind Ltd, Osaka 5308323, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2020年 / 59卷 / SG期

关键词：

MOLECULAR-ORIENTATION; EVAPORATED-FILMS; THIN-FILMS; TEMPERATURE; BEHAVIOR; TRACKING; CRYSTAL; PHASE;

D O I：

10.7567/1347-4065/ab5d70

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We fabricated a protective Parylene C layer coated with vinylidene fluoride (VDF) oligomer thin films to improve their thermal stability and investigated the temperature dependence of their pyroelectric properties. Following the heat resistance test (at 398 K for 500 h in the presence of air at atmospheric pressure), the deterioration of voltage sensitivity of the Parylene C coated sensor was approximately 20% (553 -> 430 V W-1) and approximately 100% in the case of the sensor without Parylene C (551 -> 0.86 V W-1). Parylene C coating prevented structural disturbances of VDF oligomer thin films and electrode cracking. Comparison of the VDF oligomer. Parylene-C-coated VDF oligomer, and Parylene-C-coated P (VDF-TrFE), demonstrated the superior thermal stability of the Parylene-C-coated VDF oligorneric pyroelectric sensor. (C) 2020 The Japan Society of Applied Physics

引用

页数：6

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