Structural, optical and electrical properties of amorphous carbon films deposited by pulsed unbalanced magnetron sputtering

被引：20
|
作者：
Dai, H. Y. [1 ]
Cheng, X. R. [1 ]
Wang, C. F. [2 ]
Xue, Y. C. [1 ]
Chen, Z. P. [1 ]
机构：
[1] Zhengzhou Univ Light Ind, Dept Technol & Phys, Zhengzhou 450002, Peoples R China
[2] Luoyang Ship Mat Res Inst, Luoyang 471039, Peoples R China
来源：
OPTIK | 2015年 / 126卷 / 7-8期
基金：
中国国家自然科学基金;
关键词：
Amorphous carbon films; Substrate temperature; Optical and electrical properties; MECHANICAL-PROPERTIES; DLC FILMS; MICROSTRUCTURE;
D O I：
10.1016/j.ijleo.2015.02.047
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Amorphous carbon (a-C) films were deposited by pulsed unbalanced magnetron sputtering method, the effects of substrate temperature on the structure, optical and electrical properties of the a-C films were investigated. It has been found that the sp(3) fraction in the a-C films increases with increasing substrate temperature from 50 to 100 degrees C, while decreases with increasing substrate temperature from 100 to 200 degrees C. Optical and electrical measurements show that the refractive index, optical band gap and electrical resistivity are strongly dependent on the substrate temperature. The a-C films deposited at 100 degrees C have higher refractive index, optical band gap and electrical resistivity. The possible reason for all the above observation was discussed. The results above are useful for the practical application of a-C films. (C) 2015 Elsevier GmbH. All rights reserved.
引用
收藏
页码：861 / 864
页数：4
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