Thickness determination of thin films using BSE spectra

被引：0

作者：

Schlichting, F ^{[1
]}

Berger, D ^{[1
]}

Niedrig, H ^{[1
]}

机构：

[1] Tech Univ Berlin, Inst Opt, D-10623 Berlin, Germany

来源：

ELECTRON MICROSCOPY 1998, VOL 2: MATERIALS SCIENCE 1 | 1998年

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：349 / 350

页数：2

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