Investigation for dimension effect on mechanical behavior of a metallic curved micro-cantilever beam

This paper is aimed at studying the mechanical behaviors such as maximum stress, contact force, and fatigue life of a special designed metallic curved micro-cantilever beam, using analytical, numerical (FEM), and experimental methods. This micro-beam is an applicable specimen generally used in MEMS devices. The focus is at determining the dimensions which are very important in functional conditions, reliability evaluation, and durability of this specimen and at finding a guideline for optimum design. Various types of samples that have different dimensions have been simulated and some specific specimens requested to be fabricated by a manufacturing company. In our research work, the material of the specimen is assumed to be of metallic alloys, which have good mechanical and electrical properties. Also, the structure of the specimen has a special shape and includes some fingers which have effect on mechanical behavior and electrical conductivity. In experimental method, with specified boundary conditions, mechanical loading is applied to the beam by simple but accurate methods. In analytical approach, after some mathematical calculations, for a curved cantilever beam, the equations related to the mechanical behaviors are obtained. Finally, the results obtained from the foregoing methods are compared with each other and the most fundamental effective dimension parameter on mechanical behavior of this special designed metallic curved micro-cantilever beam is determined. (C) 2010 Elsevier Ltd. All rights reserved.