Study of sol-gel Cu-doped Al2O3 thin films: structural and optical properties

被引：6

作者：

Ivanova, T. ^{[1
]}

Harizanova, A. ^{[1
]}

Koutzarova, T. ^{[2
]}

Vertruyen, B. ^{[3
]}

机构：

[1] Bulgarian Acad Sci, Cent Lab Solar Energy & New Energy Sources, BU-1784 Sofia, Bulgaria

[2] Bulgarian Acad Sci, Acad E Djakov Inst Elect, BU-1784 Sofia, Bulgaria

[3] Univ Liege, Inst Chem B6, LCIS SUPRATECS, B-4000 Liege, Belgium

来源：

18TH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES (VEIT2013) | 2014年 / 514卷

关键词：

D O I：

10.1088/1742-6596/514/1/012008

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a study of of copper-doped Al2O3 films prepared by sol-gel deposition. The films were spin-coated on Si and quartz substrates and a high-temperature treatment was conducted in the range 500 - 800 degrees C in oxygen or nitrogen. The impact was followed of the annealing procedures on the AlxCu1-xO3 films's properties. XRD was used to determine the films' structure; it revealed a mixture of amorphous and crystalline phases. Optical characterization was performed by UV-VIS spectroscopy. The sol-gel films prepared are very transparent. The band gaps of the Al-Cu-O films were estimated from the optical data, with the values ranging from 3.4 to 4.8 eV depending on the Cu content, the annealing and the gas ambients.

引用

页数：6

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