Wavelength dependence of the single pulse femtosecond laser ablation threshold of indium phosphide in the 400-2050 nm range

被引：37

作者：

Borowiec, A

Tiedje, HF

Haugen, HK

机构：

[1] McMaster Univ, Dept Engn Phys, Hamilton, ON L8S 4L7, Canada

[2] McMaster Univ, Brockhouse Inst Mat Res, Hamilton, ON L8S 4M1, Canada

[3] McMaster Univ, Dept Phys & Astron, Hamilton, ON L8S 4M1, Canada

来源：

APPLIED SURFACE SCIENCE | 2005年 / 243卷 / 1-4期

基金：

加拿大创新基金会; 加拿大自然科学与工程研究理事会;

关键词：

indium phosphide; femtosecond laser ablation of semiconductor; atomic force microscopy;

D O I：

10.1016/j.apsusc.2004.09.105

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We present single pulse femtosecond laser ablation threshold measurements of InP obtained by optical, scanning electron, and atomic force microscopy. The experiments were conducted with laser pulses 65-175 fs in duration, in the wavelength range from 400 to 2050 nm, covering the photon energy region above and below the bandgap of InP. The ablation thresholds determined from depth and volume measurements varied from 87 mJ/cm(2) at 400 nm to 250 mJ/cm(2) at 2050 nm. In addition, crater depths and volumes were measured over a range of laser fluences extending well above the ablation threshold. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：129 / 137

页数：9

共 10 条

[1] Micrograting polymerization fabrication with a single femtosecond laser pulse at 400 nm wavelength
Guo, HC
Guo, HC
Jiang, HB
Yang, H
Gong, QH
Wang, T
Shi, MQ
Wu, FP
CHINESE PHYSICS LETTERS, 2003, 20 (05) : 682 - 684
[2] Wavelength dependence of femtosecond laser ablation threshold of corneal stroma
Olivie, G.
Giguere, D.
Vidal, F.
Ozaki, T.
Kieffer, J. -C.
Nada, O.
Brunette, I.
OPTICS EXPRESS, 2008, 16 (06): : 4121 - 4129
[3] Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air
Bonse, J
Munz, M
Sturm, H
NANOTECHNOLOGY, 2003, 5118 : 221 - 234
[4] Femtosecond laser corneal ablation threshold: Dependence on tissue depth and laser pulse width
Sun, Hui
Han, Meng
Niemz, Markolf H.
Bille, Josef F.
LASERS IN SURGERY AND MEDICINE, 2007, 39 (08) : 654 - 658
[5] Femtosecond laser ablation of Au film around single pulse threshold
Electronic Engineering Department, Tianjin University of Technology and Education, Tianjin 300222, China
不详
不详
Chin. Opt. Lett., 2006, 4 (225-227):
[6] Femtosecond laser ablation of Au film around single pulse threshold
倪晓昌
王清月
吴殷忠
杨丽
贾威
柴路
Chinese Optics Letters, 2006, (04) : 225 - 227
[7] Investigation on single-pulse 266 nm nanosecond laser and 780 nm femtosecond laser ablation of sapphire
Tian, Z.
Li, X.
Qi, L.
ADVANCED LASER PROCESSING AND MANUFACTURING IV, 2020, 11546
[8] Single pulse nm-size grating formation in polymers using laser ablation with an irradiation wavelength of 355 nm
Lippert, T
Gerber, T
Wokaun, A
Funk, DJ
Fukumura, H
Goto, M
APPLIED PHYSICS LETTERS, 1999, 75 (07) : 1018 - 1020
[9] Laser drilling of micro-holes in single crystal silicon, indium phosphide and indium antimonide using a continuous wave (CW) 1070 nm fibre laser with millisecond pulse widths
Maclean, Jessica O.
Tangkijcharoenchai, C.
Coomber, Stuart
Voisey, Katy T.
10TH CIRP CONFERENCE ON PHOTONIC TECHNOLOGIES [LANE 2018], 2018, 74 : 407 - 412
[10] Investigation of the irradiance-dependent spectral transmittance of laser filters in the nanosecond- and femtosecond-pulse regime in the wavelength range between 700 and 800 nm
Schirmacher, A
Sutter, E
Werhahn, O
Siegner, U
Nevejina-Sturhan, A
JOURNAL OF LASER APPLICATIONS, 2005, 17 (03) : 191 - 197

← 1 →