Scanning Twyman interferometer for measuring small angular displacement

被引：0
|
作者：
Ma Jianguo [1 ]
Tong Yue [1 ]
机构：
[1] Huainan Normal Univ, Dept Phys & Elect Informat, Huainan 232001, Anhui, Peoples R China
来源：
FOURTH INTERNATIONAL SEMINAR ON MODERN CUTTING AND MEASUREMENT ENGINEERING | 2011年 / 7997卷
关键词：
scanning Twyman interferometer; small-angular displacement measurement; piezoelectric ceramic (PZT); photoelectric detector; oscillogram; interference crest;
D O I：
10.1117/12.888647
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
We present a simple but effective method for measuring small angular displacement based on a scanning Twyman interferometer, in which, one of the two mirrors is mounted on the piezoelectric ceramic (PZT) droved by saw-tooth voltage, the status of interference fringes changes from static to dynamic. A photoelectric detector detects this dynamic photo-signal and changes into electronic signal. The signal is inputted into an oscillograph. The oscillogram will present interference crests. The method for measuring small angular displacement is based on the linear relation between the angular displacement and the crest shift on the oscillogram.
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页数：6
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