Structural, Optical and Electrical Properties of Fluorine Doped Tin Oxide Thin Films Deposited Using Inkjet Printing Technique

被引:0
|
作者
Samad, Wan Zurina [1 ]
Salleh, Muhamad Mat [2 ]
Shafiee, Ashkan [2 ]
Yarmo, Mohd Ambar [1 ]
机构
[1] Univ Kebangsaan Malaysia, Sch Chem Sci & Food Technol, Fac Sci & Technol, Ukm Bangi 43600, Selangor De, Malaysia
[2] Univ Kebangsaan Malaysia, Inst Microengn & Nanoelect IMEN, Ukm Bangi 43600, Selangor De, Malaysia
来源
SAINS MALAYSIANA | 2011年 / 40卷 / 03期
关键词
Fluorine-doped tin oxide; inkjet printing; transparent conducting oxide; FABRICATION;
D O I
暂无
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
This paper reports on structural, optical transmittance and electrical properties of fluorine-doped tin oxide (FTO) thin films deposited using an inkjet printer. The FTO ink was synthesized from a mixture of tin chloride pentahydrate (SnCl4 center dot 5H(2)O) and ammonium fluoride (NH4F) solutions. The thin films were deposited on glass substrates at ambient temperature or heated at 40 degrees C and 60 degrees C. The surface electronic state and the elemental composition of the thin/films were analyzed using XPS spectroscopy. The spectra of the FTO thin films revealed that tin, oxygen, fluoride and carbon were present in the samples. The signals corresponding to Sn 3d(5/2), O-1s, and F-1s were found at 486.6 eV, 530.5 eV and 684.5 eV respectively. XRD analysis showed that the FTO films were in the form of crystalline with cassiterite shape. The optical and electrical properties of the films were affected by the deposition temperatures. It was observed the film deposited at 40 degrees C has the optimum optical transmittance and sheet resistivity which were 91%T and 16 Omega/square, respectively.
引用
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页码:251 / 257
页数:7
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