Development of high precision laser heterodyne metrology gauges

被引：7
|
作者：
Zhao, F [1 ]
机构：
[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA
来源：
ADVANCED SENSOR SYSTEMS AND APPLICATIONS II PT 1AND 2 | 2004年 / 5634卷
关键词：
laser interferometers; metrology; heterodyne interferometers;
D O I：
10.1117/12.569844
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Laser interferometers with better than 10 picometer (pm) accuracy in displacement measurement and 1-3 microns in absolute distance ranging accuracy are sought in several of NASA's planned missions, such as the Space Interferometry Mission (SIM) and Terrestrial Planet Finder (TPF). Over the past several years, we have made significant progress at JPL toward a laser heterodyne interferometer system that can provide both picometer displacement measurement and micron level absolute distance measurement. This paper presents an review on the development of high precision metrology gauges for these missions.
引用
收藏
页码：247 / 259
页数：13
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