Structure property of titanium dioxide thin films in sintered temperature by the sol-gel method

被引：1
|
作者：
Huang, Chien-Jung [1 ]
Liao, Kuo-Chien [2 ]
Su, Yan-Kuin [2 ,3 ,4 ]
机构：
[1] Natkl Univ Kaohsiung, Dept Appl Phys, 700 Kaohsiung Univ Rd, Kaohsiung, Taiwan
[2] Sun Yat Sen Univ, Inst Electro Optical Engn, Kaohsiung 804, Taiwan
[3] Natl Cheng Kung Univ, Inst Microelect, Tainan 701, Taiwan
[4] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 701, Taiwan
来源：
HIGH-PERFORMANCE CERAMICS V, PTS 1 AND 2 | 2008年 / 368-372卷
关键词：
sol-gel; refractive index; sintering;
D O I：
10.4028/www.scientific.net/KEM.368-372.1465
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Titanium dioxide (TiO2) thin film on glass substrate is fabricated by sot-gel method. The TiO2 film is sintered at various temperatures for investigation on the refraction index and crystallization characteristic. The lower refractive index of the TiO2 thin film is 1.89 when the sintering is performed at the low temperature of 200 degrees C and the thickness is 448 nm. However, the higher refractive index of 2.55 and chemical stability of the TiO2 film in rutile phase are obtained via sintering temperature at 700 degrees C.
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页码：1465 / +
页数：2
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