Ablation Plume Induced by Laser Euv Radiation

被引：2
|
作者：
Frolov, O. [1 ]
Kolacek, K. [1 ]
Schmidt, J. [1 ]
Straus, J. [1 ]
机构：
[1] Acad Sci Czech Republ, Inst Plasma Phys, Vvi, Prague 18200, Czech Republic
来源：
X-RAY LASERS 2014 | 2016年 / 169卷
关键词：
REPETITION-RATE; DIAGNOSTICS; SURFACE;
D O I：
10.1007/978-3-319-19521-6_52
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we report results of study laser plasma plumes created by nanosecond EUV laser pulses at wavelength of 46.9 nm in different materials (Au, Al, Si, Cu). Experiment with attenuation of Al filters for verification of energy of laser pulses was performed. In the ablation plume experiment low energy of laser pulse in the most cases was not sufficient for creation of ablation plumes in Cu, Al and Si. In contrast, higher energy has a greater effect in all the materials.
引用
收藏
页码：397 / 403
页数：7
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