Property of nitrogenated tetrahedral carbon on magnetic head prepared by filtered cathodic are deposition

被引：0
|
作者：
Yang Mingchu [1 ]
Gonzaga, Leonard [1 ]
Bo, Liu [1 ]
机构：
[1] NUS, Data Storage Inst, Singapore 117608, Singapore
来源：
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 4, NO 12 | 2007年 / 4卷 / 12期
关键词：
D O I：
10.1002/pssc.200777146
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nitrogenated tetrahedral carbon films were prepared by filtered cathodic arc deposition. Raman spectroscopy analysis shows N incorporation increases the clustering of the sp(2) phase, Nanoindentaion shows the hardness reduction caused by N incorporation can be compensated by optimization of C ion energy in the deposition. Ta-C:N films shows higher extinction coefficient and less transparency. The good morphology of films implies ta-C:N overcoat has good coverage on magnetic head. Corrosion experiment reveals taC:N overcoat has better anti-corrosion performance. (C) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：4400 / 4403
页数：4
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