Surface roughness of optical glass under magnetorheological finishing

被引:5
|
作者
Zhang, FH [1 ]
Kang, GW [1 ]
Qiu, ZJ [1 ]
机构
[1] Harbin Inst Technol, Dept Mech Mfg & Automat, Harbin 150001, Peoples R China
来源
关键词
magnetorheological finishing; surface roughness; optical glass;
D O I
10.4028/www.scientific.net/KEM.259-260.662
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Magnetorheological finishing (MRF) is a novel optical machining technology. The mechanism of MRF is introduced, the polishing experiment of optical glass of MRF is conducted through changing the polishing parameters such as magnetic field intensity, content of polishing abrasive and rotation speed of polishing wheel. Through proper controlling of the finishing parameters, the polished surface roughness of optical glass is Ra 1.132 nm measured by an AFM.
引用
收藏
页码:662 / 666
页数:5
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