Research and design of synchronous phase shifting optical profile detection system

被引:0
|
作者
Huang, Yaolin [1 ]
Ding, Chengkai [1 ]
Wang, Min [1 ]
Shao, Xiaoping [1 ]
机构
[1] Fujian Normal Univ, Minist Educ, Key Lab OptoElect Sci & Technol Med, Fujian Prov Key Lab Photon Technol, Fuzhou 350007, Fujian, Peoples R China
关键词
surface deviation; polarization interference; synchronous phase shifting; detection precision; two dimensional grating; polarization matrix;
D O I
10.1117/12.2504890
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
With the ever-increasing use of optical products, the demand to precision of lens manufacturing is more and more strict. In order to improve the precision, we should not only improve the grinding technology, the more important one is the improvement of detecting technology. With the application of surface deviation detection method, we could improve the lens surface accuracy efficiently. In addition, how to finish the precision detection in harsh environment has a very important significance for outdoor debugging assembly and workshop online detection. In this essay, we introduced a synchronous phase shifting optical surface detection system on the basis of Tyman-Green interference light path. It will solve the problem that the system is affected by the environmental disturbance and decrease the detection precision. We used two-dimensional grating as light splitting component, the polarization matrix as the phase shifting element to realize the acquisition of four polarization images with fixed phase difference at the same time, which can eliminate the influence of the environmental disturbance and improve the detection accuracy by the software algorithm. In order to provide the conditions for the system to detect the lens in the harsh environment and the online detection of the lens in the workshop.
引用
收藏
页数:8
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