PEB model with cross-diffusion

被引:4
|
作者
Granik, Y [1 ]
机构
[1] Mentor Graph Corp, San Jose, CA 95131 USA
关键词
lithography; PEB; post-exposure baking; acid transport; acid diffusion; CAR;
D O I
10.1117/12.488801
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In multi-component chemical systems, thermodynamic fluxes linearly depend on thermodynamic forces through the matrix of Onsager's coefficients. By applying Onsager's relationship to the PEB diffusion of acid and other relevant chemical components, we deducted a generalization of the traditional PEB diffusion-reaction equations. This generalized system includes cross-diffusion coefficients. We have shown that certain combinations of these coefficients predict acid propagation with constant speed, even when all coefficients are constant. This serves as an alternate explanation to the conventional theory, which has to assume exponential dependency of the acid diffusion coefficient on activated site concentration. The model with cross-diffusion coefficients has additional degrees of freedom, which makes it more flexible in calibrations to the empirical data.
引用
收藏
页码:1098 / 1104
页数:7
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