Laser-based materials growth and microfabrication

被引：0
|
作者：
Vainos, NA [1 ]
机构：
[1] Fdn Res & Technol Hellas, Inst Elect Struct & Laser, Iraklion 71110, Greece
来源：
2000 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, CAS 2000 PROCEEDINGS | 2000年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The ablation of materials by intense laser pulses enables a range of direct materials processing methods. Pulsed laser deposition achieves even epitaxial growth of complex compounds or precisely tuned novel structures. The spatially selective ablation process results in direct materials microetching and microdeposition offering novel, low-cost alternative microfabrication tools.
引用
收藏
页码：421 / 426
页数：6
相关论文
共 50 条
  • [1] Laser-Based Digital Microfabrication
    Pique, Alberto
    Kim, Heungsoo
    Auyeung, Ray
    Wang, Jiwen
    Birnbaum, Andrew
    Mathews, Scott
    [J]. NIP 25: DIGITAL FABRICATION 2009, TECHNICAL PROGRAM AND PROCEEDINGS, 2009, : 394 - 397
  • [2] Processing of metals and semiconductors by a femtosecond laser-based microfabrication system
    Meunier, M
    Fisette, B
    Houle, A
    Kabashin, AV
    Broude, SV
    Miller, P
    [J]. COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST LASERS III, 2003, 4978 : 169 - 179
  • [3] Evaluating Laser-Based Microfabrication in Microfluidics: An Experimental and Computational Trial
    Betti, Alice
    Ongaro, Claudio
    Zardin, Barbara
    Bertacchini, Jessika
    Tagliaferri, Nadia
    Siciliani, Vincenzina
    Orazi, Leonardo
    Borghi, Massimo
    [J]. Advanced Engineering Materials, 2024, 26 (21)
  • [4] Laser-based additive manufacturing: Processes and materials
    Schmidt, Michael
    Dahotre, Narendra B.
    Bourell, David
    Toyserkani, Ehsan
    [J]. OPTICS AND LASER TECHNOLOGY, 2021, 139
  • [5] Overview: focus on laser-based manufacturing and materials processing
    Quazi, M.M.
    Ezazi, Mohammadamin
    Arslan, A.
    Bashir, M.N.
    Ali, M.M.
    [J]. Materials Research Express, 2024, 11 (10)
  • [6] Laser-based microstrain measurements in dental materials.
    Kirkpatrick, SJ
    Covey, DA
    [J]. JOURNAL OF DENTAL RESEARCH, 1996, 75 : 2165 - 2165
  • [7] Sorting of refractory materials - A unique laser-based solution
    Gumpenberger, Thomas
    Gruber, Johann
    Huber, Norbert
    [J]. CFI-CERAMIC FORUM INTERNATIONAL, 2008, 85 (04): : E43 - E47
  • [8] Applications of broadband laser-based ultrasound to materials testing
    Pierce, SG
    Culshaw, B
    [J]. SMART MATERIALS AND STRUCTURES, 1999, : 421 - 427
  • [9] In situ TEM Raman spectroscopy and laser-based materials modification
    Allen, F. I.
    Kim, E.
    Andresen, N. C.
    Grigoropoulos, C. P.
    Minor, A. M.
    [J]. ULTRAMICROSCOPY, 2017, 178 : 33 - 37
  • [10] A New Femtosecond Laser-Based Tomography Technique for Multiphase Materials
    Echlin, McLean P.
    Husseini, Naji S.
    Nees, John A.
    Pollock, Tresa M.
    [J]. ADVANCED MATERIALS, 2011, 23 (20) : 2339 - +
12345