New Type Small-Angle Sensor Based on the Surface Plasmon Resonance Technology in Heterodyne Interferometry

被引：0
|
作者：
Wang, Shinn-Fwu [1 ]
Kao, Fu-Hsi [1 ]
Liu, An-Li [1 ]
Chiu, Jyh-Shyan [1 ]
Lai, Wesley [1 ]
Hsieh, Meng-Feng [1 ]
Chung, Hung-Chen [1 ]
机构：
[1] Ching Yun Univ, Dept Elect Engn, Jhongli, Taoyuan, Taiwan
来源：
2011 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE (I2MTC) | 2011年
关键词：
Attenuated total-internal reflections (ATR); Heterodyne interferometry (HI); Surface plasmon resonance (SPR); Kretchmann's configuration; Small angle measurement;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In the paper, a new type small-angle sensor based on the surface plasmon resonance (SPR) Technology in heterodyne interferometry (HI) is proposed. The sensing unit is a prism assembly that is composed of a half-wave (lambda/2) plate, two right-angle prisms and two rotation stages. As a heterodyne optical source passes through this experimental structure, we can achieve the small rotation angle only by measuring the variation in phase difference between p- and s-polarizations. The resolution of the system can approximately reach 1.06x10(-8) radian at least. The new instrument has some merits, e. g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.
引用
收藏
页码：942 / 945
页数：4
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