Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser

被引：82
|
作者：
Kanai, T
Kanda, T
Sekikawa, T
Watanabe, S
Togashi, T
Chen, CT
Zhang, CQ
Xu, ZY
Wang, JY
机构：
[1] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan
[2] RIKEN, Inst Phys & Chem Res, Sayogun, Hyogo 6795148, Japan
[3] Chinese Acad Sci, Beijing Ctr Crystal R&D, Beijing 10080, Peoples R China
[4] Chinese Acad Sci, Inst Phys, Beijing 10080, Peoples R China
[5] Shandong Univ, Natl Key Lab Crystal Mat, Jinan 250100, Shandon, Peoples R China
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS | 2004年 / 21卷 / 02期
关键词：
D O I：
10.1364/JOSAB.21.000370
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have generated a vacuum-ultraviolet light below 160 nm by sum-frequency mixing in an optically contacted, prism-coupled KBe2BO3F2 crystal. The vacuum-ultraviolet light was generated as the fifth harmonic of a tunable, single-mode, 1-kHz Ti:sapphire laser system. The wavelength of 156 nm, to our knowledge, is the shortest ever obtained by use of nonlinear crystals in a phase-matched process. In addition, we demonstrated a 157.6-nm light source as an inspection tool for F-2 laser lithography with an average power of 0.8 muW. (C) 2004 Optical Society of America.
引用
收藏
页码：370 / 375
页数：6
相关论文
共 17 条
  • [1] Generation of 160 nm vacuum ultraviolet light at 82 MHz in a KBBF crystal by the fifth-harmonic of a Ti:sapphire laser
    Zhang, Yun
    Wang, Lirong
    CHINESE OPTICS LETTERS, 2024, 22 (05)
  • [2] Generation of 160 nm vacuum ultraviolet light at 82 MHz in a KBBF crystal by the fifth-harmonic of a Ti:sapphire laser
    张赟
    汪丽蓉
    ChineseOpticsLetters, 2024, 22 (05) : 100 - 104
  • [3] Generation of quasi-continuous-wave vacuum-ultraviolet coherent light by fourth-harmonic of a Ti:sapphire laser with KBBF crystal
    Zhang, Yun
    Sato, Yusuke
    Watanabe, Nobuyoshi
    Ananda, Riskey
    Okada-Shudo, Yoshiko
    Watanabe, Masayoshi
    Hyodo, Masaharu
    Wang, Xiaoyang
    Chen, Chuangtian
    Kanai, Teruto
    Watanabe, Shuntaro
    OPTICS EXPRESS, 2009, 17 (10): : 8119 - 8124
  • [4] Experimental and theoretical investigations on high power vacuum-ultraviolet laser at 165 nm by eighth-harmonic generation in KBBF
    Li, Yu-Jiao
    Zong, Nan
    Dai, Shi-Bo
    Wang, Zhi-Min
    Zhang, Shen-Jin
    Yang, Feng
    Zhang, Feng-Feng
    Xu, Feng-Liang
    Kou, Yang
    Peng, Qin-Jun
    Liu, Li-Juan
    Wang, Xiao-Yang
    Li, Ru-Kang
    Cui, Da-Fu
    Xu, Zu-Yan
    OPTICS AND LASER TECHNOLOGY, 2019, 120
  • [5] Vacuum ultraviolet pulses of 11 fs from fifth-harmonic generation of a Ti:sapphire laser
    Kosma, Kyriaki
    Trushin, Sergei A.
    Schmid, Wolfram E.
    Fuss, Werner
    OPTICS LETTERS, 2008, 33 (07) : 723 - 725
  • [6] 167.75-nm vacuum-ultraviolet ps laser by eighth-harmonic generation of a 1342-nm Nd: YVO4 amplifier in KBBF
    Dai, Shi-Bo
    Zong, Nan
    Yang, Feng
    Zhang, Shen-Jin
    Wang, Zhi-Min
    Zhang, Feng-Feng
    Tu, Wei
    Shang, Lin-Qiao
    Liu, Li-Juan
    Wang, Xiao-Yang
    Zhang, Jing-Yuan
    Cui, Da-Fu
    Peng, Qin-Jun
    Li, Ru-Kang
    Chen, Chuang-Tian
    Xu, Zu-Yan
    OPTICS LETTERS, 2015, 40 (14) : 3268 - 3271
  • [7] High-power fifth-harmonic generation of femtosecond pulses in the vacuum ultraviolet using a Ti:sapphire laser
    Tzankov, Pancho
    Steinkellner, Oliver
    Zheng, Jiaan
    Mero, Mark
    Freyer, Wolfgang
    Husakou, Anton
    Babushkin, Ihar
    Herrmann, Joachim
    Noack, Frank
    OPTICS EXPRESS, 2007, 15 (10): : 6389 - 6395
  • [8] Development of high-power, 6 kHz, single-mode Ti:sapphire laser at 904 nm for generating 193 nm light
    Tsuboi, Mizuki
    Nakazato, Tomoharu
    Onose, Takashi
    Tanaka, Yuichi
    Sarukura, Nobuhiko
    Kakizaki, Kouji
    Watanabe, Shuntaro
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (04)
  • [9] Novel planarization method of single-crystal diamond using 172 nm vacuum-ultraviolet light
    Kubota, Akihisa
    Takita, Takahiro
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2018, 54 : 269 - 275
  • [10] Generation of subpicosecond vacuum ultraviolet pulses at 126 nm by using harmonics of a subpicosecond Ti:Sapphire laser
    Katto, Masahito
    Oda, Kazuyoshi
    Kaku, Masanori
    Yokotani, Atsushi
    Kubodera, Shoichi
    Miyanaga, Noriaki
    Mima, Kunioki
    OPTICS COMMUNICATIONS, 2010, 283 (03) : 414 - 416
12