A magnetically levitated synchronous permanent magnet planar motor with concentric structure winding used for lithography machine

被引：2
|
作者：
Zhang, Lu [1 ]
Kou, Baoquan [1 ]
Xing, Feng [1 ]
Jin, Yinxi [1 ]
Zhang, Hailin [1 ]
Zhu, Jianguo [2 ]
机构：
[1] Harbin Inst Technol, Dept Elect Engn, Harbin 150006, Peoples R China
[2] Univ Technol Sydney, Ctr Elect Machines & Power Elect, Sydney, NSW 2007, Australia
来源：
JOURNAL OF APPLIED PHYSICS | 2015年 / 117卷 / 17期
关键词：
D O I：
10.1063/1.4917332
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A novel magnetically levitated synchronous permanent magnet planar motor (MLSPMPM) with concentric structure winding, which can be used in lithography machine, is proposed in this paper. Topology and principle of the new MLSPMPM are introduced. The scalar magnetic potential is used to solve the magnetic system, and the differential equations are solved by the separation of variables method according to the boundary conditions. Characteristics, such as flux density, electromagnetic force, and back-EMF of the MLSPMPM, are obtained analytically. All of the results are validated by the finite element method. A prototype of the MLSPMPM is manufactured. Based on the prototype motor, some experiments are carried out. The measured results are used to showcase the validity of the analytical analysis. (c) 2015 AIP Publishing LLC.
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页数：4
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