Morphology of femtosecond-laser-ablated borosilicate glass surfaces

被引:114
|
作者
Ben-Yakar, A [1 ]
Byer, RL
Harkin, A
Ashmore, J
Stone, HA
Shen, M
Mazur, E
机构
[1] Stanford Univ, Dept Appl Phys, Ginzton Lab, Stanford, CA 94305 USA
[2] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
[3] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA
关键词
D O I
10.1063/1.1619560
中图分类号
O59 [应用物理学];
学科分类号
摘要
We study the morphology of borosilicate glass surface machined by femtosecond laser pulses. Our observations show that a thin rim is formed around ablated craters after a single laser pulse. When multiple laser pulses are overlapped, the crater rims also overlap and produce a surface roughness. The rim appears to be a resolidified splash from a molten layer generated during the ablation process. We estimate that this molten layer is a few micrometers thick and exists for a few microseconds. During this melt lifetime, forces acting on the molten layer move it from the center to the edge of the crater. (C) 2003 American Institute of Physics.
引用
收藏
页码:3030 / 3032
页数:3
相关论文
共 50 条
  • [1] Optoelectronic Properties in the Terahertz of Femtosecond-laser-ablated GaAs
    Madeo, J.
    Margiolakis, A.
    Zhao, Z. -Y.
    Hale, P. J.
    Man, M. K. L.
    Zhao, Q. -Z.
    Peng, W.
    Shi, W. -Z.
    Dani, K. M.
    Mariserla, Bala Murali Krishna
    2016 PROGRESS IN ELECTROMAGNETICS RESEARCH SYMPOSIUM (PIERS), 2016, : 2390 - 2390
  • [2] Ultrafast properties of femtosecond-laser-ablated GaAs and its application to terahertz optoelectronics
    Madeo, Julien
    Margiolakis, Athanasios
    Zhao, Zhen-Yu
    Hale, Peter J.
    Man, Michael K. L.
    Zhao, Quan-Zhong
    Peng, Wei
    Shi, Wang-Zhou
    Dani, Keshav M.
    OPTICS LETTERS, 2015, 40 (14) : 3388 - 3391
  • [3] Solvent vapor treatment controls surface wettability in PMMA femtosecond-laser-ablated microchannels
    Carmela De Marco
    Shane M. Eaton
    Rebeca Martinez-Vazquez
    Stefano Rampini
    Giulio Cerullo
    Marinella Levi
    Stefano Turri
    Roberto Osellame
    Microfluidics and Nanofluidics, 2013, 14 : 171 - 176
  • [4] Solvent vapor treatment controls surface wettability in PMMA femtosecond-laser-ablated microchannels
    De Marco, Carmela
    Eaton, Shane M.
    Martinez-Vazquez, Rebeca
    Rampini, Stefano
    Cerullo, Giulio
    Levi, Marinella
    Turri, Stefano
    Osellame, Roberto
    MICROFLUIDICS AND NANOFLUIDICS, 2013, 14 (1-2) : 171 - 176
  • [5] Femtosecond laser ablation properties of borosilicate glass
    Ben-Yakar, A
    Byer, RL
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (09) : 5316 - 5323
  • [6] Characterization of femtosecond-laser-ablated a germanium single crystal in air by using X-ray diffraction
    Park, MI
    Park, CO
    Kim, CS
    Jeoung, SC
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2005, 46 (02) : 531 - 535
  • [7] Measured and calculated volume of metal surfaces ablated by femtosecond laser
    Malkhasyan, Vahan
    Assoul, Mohamed
    Monteil, Guy
    2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC), 2017,
  • [8] Prediction of the shape and volume of metal surfaces ablated by femtosecond laser
    Malkhasyan, Vahan
    Assoul, Mohamed
    Monteil, Guy
    2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR), 2017,
  • [9] Ablated gratings on borosilicate glass by 193-nm excimer laser radiation
    S. Pissadakis
    L. Reekie
    M. Hempstead
    M.N. Zervas
    J.S. Wilkinson
    Applied Physics A, 1999, 69 : S739 - S741
  • [10] Ablated gratings on borosilicate glass by 193-nm excimer laser radiation
    Pissadakis, S
    Reekie, L
    Hempstead, M
    Zervas, MN
    Wilkinson, JS
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (Suppl 1): : S739 - S741