Dynamic sequential layer-by-layer deposition method for fast and region-selective multilayer thin film fabrication

被引:44
|
作者
Kim, HJ [1 ]
Lee, K [1 ]
Kumar, S [1 ]
Kim, J [1 ]
机构
[1] Univ Michigan, Dept Mat Sci & Engn, Ann Arbor, MI 48109 USA
关键词
D O I
10.1021/la0511182
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We present a newly devised technique, the dynamic layer-by-layer (LbL) deposition method, that is designed to take advantage of the LbL deposition method and fluidic devices. Polyelectrolyte solutions are sequentially injected through the fluidic LbL deposition device to quickly build well-defined multilayer films on a selected region with a linear increase in the material deposited. Multilayer film fabrication by this new method on a specific region was proven to be fast and effective. The effects on film quality of the processing parameters such as concentration of polyelectrolytes, flow rate, and contact time were investigated. A half-tethered self-standing film on a substrate was fabricated to demonstrate the effectiveness and the region-selective deposition capability of the devised dynamic LbL deposition method.
引用
收藏
页码:8532 / 8538
页数:7
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