Application of mapping dynamics to analysis of a capacitive RF discharge

被引：0
|
作者：
Lichtenberg, AJ [1 ]
Cohen, R [1 ]
Wang, ZD [1 ]
机构：
[1] Univ Calif Berkeley, Berkeley, CA 94720 USA
来源：
ELECTRON KINETICS AND APPLICATIONS OF GLOW DISCHARGES | 1998年 / 367卷
关键词：
D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：227 / 240
页数：14
相关论文
共 50 条
  • [1] NUMERICAL SIMULATION OF THE DYNAMICS OF RF CAPACITIVE DISCHARGE IN CARBON DIOXIDE
    Lisovskiy, V.
    Dudin, S.
    Shakhnazarian, A.
    Platonov, P.
    Yegorenkov, V.
    EAST EUROPEAN JOURNAL OF PHYSICS, 2024, (03): : 172 - 187
  • [2] Electrostatic discharge failure analysis of capacitive RF MEMS switches
    Ruan, J.
    Nolhier, N.
    Bafleur, M.
    Bary, L.
    Coccetti, F.
    Lisec, T.
    Plana, R.
    MICROELECTRONICS RELIABILITY, 2007, 47 (9-11) : 1818 - 1822
  • [3] IGNITION AND PROPERTIES OF RF CAPACITIVE DISCHARGE IN ACETYLENE
    Lisovskiy, V. A.
    Dudin, S. V.
    Platonov, P. P.
    Bogatyrenko, S. I.
    Minenkov, A. A.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2019, (04): : 135 - 140
  • [4] Growth of diamond in an electrodeless capacitive RF discharge
    Laimer, J.
    Putz, W.
    Stori, H.
    Janz, P.
    Winkler, H.
    International Journal of Refractory Metals and Hard Materials, 14 (1-3 SPEC. ISS.): : 173 - 178
  • [5] Lighthouse Plasma Instability in a Capacitive RF Discharge
    Wegner, Thomas
    Kuellig, Christian
    Meichsner, Juergen
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2014, 42 (10) : 2572 - 2573
  • [6] Dust Hour Glass in a Capacitive RF Discharge
    Iwashita, Shinya
    Schuengel, Edmund
    Schulze, Julian
    Hartmann, Peter
    Donko, Zoltan
    Uchida, Giichiro
    Koga, Kazunori
    Shiratani, Masaharu
    Czarnetzki, Uwe
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2014, 42 (10) : 2672 - 2673
  • [7] Breakdown characteristics of RF argon capacitive discharge
    Sato, M
    Shoji, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (9A): : 5729 - 5730
  • [8] Growth of diamond in an electrodeless capacitive RF discharge
    Laimer, J
    Putz, W
    Stori, H
    Janz, P
    Winkler, H
    INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 1996, 14 (1-3): : 173 - 178
  • [9] Breakdown characteristics of RF argon capacitive discharge
    Yamagata Univ, Yonezawa, Japan
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1997, 36 (9 A): : 5729 - 5730
  • [10] DYNAMICS OF A COLLISIONAL, CAPACITIVE RF SHEATH
    LIEBERMAN, MA
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1989, 17 (02) : 338 - 341
12345