Interferometric measurements of small-scale irregularities: highly reflecting surfaces

被引：5
|
作者：
Hariharan, P [1 ]
机构：
[1] CSIRO, Div Telecommun & Ind Phys, Lindfield, NSW 2070, Australia
来源：
OPTICAL ENGINEERING | 1998年 / 37卷 / 10期
关键词：
interferometry; optical testing; small-scale irregularities; highly reflecting surfaces;
D O I：
10.1117/1.601814
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
With uncoated optical surfaces, it is possible to use a Fizeau interferometer to make direct measurements of small-scale irregularities with very small amplitudes. However, problems arise with highly reflecting surfaces. Some optical systems that can be used for such measurements are described. (C) 1998 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(98)01010-1].
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页码：2751 / 2753
页数：3
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