Hydride generation system was applied to inductively coupled plasma mass spectrometry when a simple laboratory-built concentric nebulizer was used as interface. The performance of the continuous flow hydride generation system, the pneumatic slug flow hydride generation system and the pneumatic flow injection hydride generation system was investigated when they were combined with inductively coupled plasma-mass spectrometry. The analytical performance of the system was carefully studied, and the best system parameters were obtained. Eight elements which can form hydrides were quantitatively determined.