Dynamic Metrology and Data Processing for Precision Freeform Optics Fabrication and Testing

被引:0
|
作者
Aftab, Maham [1 ]
Trumper, Isaac [1 ]
Huang, Lei [2 ]
Choi, Heejoo [1 ]
Zhao, Wenchuan [3 ]
Graves, Logan [1 ]
Oh, Chang Jin [1 ]
Kim, Dae Wook [1 ,4 ]
机构
[1] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA
[2] Tsinghua Univ, Dept Precis Instruments, Beijing 100084, Peoples R China
[3] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
[4] Univ Arizona, Steward Observ, Tucson, AZ 85721 USA
关键词
Metrology; Optical Fabrication & Testing; Data Processing; Precision Optics; Freeform Optics; Deflectometry;
D O I
10.1117/12.2272353
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Dynamic metrology holds the key to overcoming several challenging limitations of conventional optical metrology, especially with regards to precision freeform optical elements. We present two dynamic metrology systems: 1) adaptive interferometric null testing; and 2) instantaneous phase shifting deflectometry, along with an overview of a gradient data processing and surface reconstruction technique. The adaptive null testing method, utilizing a deformable mirror, adopts a stochastic parallel gradient descent search algorithm in order to dynamically create a null testing condition for unknown freeform optics. The single-shot deflectometry system implemented on an iPhone uses a multiplexed display pattern to enable dynamic measurements of time-varying optical components or optics in vibration. Experimental data, measurement accuracy / precision, and data processing algorithms are discussed.
引用
收藏
页数:8
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