Pull-in analysis of scanners actuated by electrostatic vertical combdrives

被引：1
|
作者：
Lee, Daesung [1 ]
Solgaard, Olav [1 ]
机构：
[1] Stanford Univ, EL Ginzton Lab, Stanford, CA 94305 USA
来源：
2007 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2007年
关键词：
pull-in; vertical combdrive; comb gap; scanner; in-plane twist;
D O I：
10.1109/OMEMS.2007.4373852
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents an analysis of pull-in due to in-plane twist in MEMS scanners actuated by vertical combdrives with general comb gap arrangements and cross-sections. The analysis is based on a 2-DOF actuator with a single voltage control. A closed-form pull-in deflection angle expression is obtained by accurately modeling the capacitance between the movable and fixed combs. The analysis results are in good agreement with simulations, and allow optimization of scanner designs by combining pull-in deflection angle, capacitance maximum angle, and available torque.
引用
收藏
页码：85 / 86
页数：2
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