Motion controller for the Atomic Force Microscopy based nanomanipulation system

被引：1

作者：

Yang, Ruiguo ^{[1
]}

Xi, Ning ^{[1
]}

Lai, King Wai Chiu ^{[1
]}

Gao, Bingtuan ^{[1
]}

Chen, Hongzhi ^{[1
]}

Su, Chanmin ^{[2
]}

Shi, Jian ^{[2
]}

机构：

[1] Michigan State Univ, Dept Elect & Comp Engn, E Lansing, MI 48823 USA

[2] Veeco Instruments Inc, Santa Barbara, CA 93117 USA

来源：

2009 IEEE-RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS | 2009年

关键词：

MANIPULATION;

D O I：

10.1109/IROS.2009.5353921

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

Nanomanipulation with Atomic Force Microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response of the control system. We designed and implemented two distinct control schemes by using real-time Linux. The aim is to study various factors in the control of the AFM based nanomanipulation system. By integrating the original controller with the external Linux real-time controller, we achieved a stable system with high response frequency. Finally this Multiple Input Single Output (MISO) system is validated to be an effective and efficient tool for the controlling of the nanolithography operation through a haptic device.

引用

页码：1339 / 1344

页数：6

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