Excimer laser structuring of bulk polyimide material

被引：6
|
作者：
Danev, G [1 ]
Spassova, E
Assa, J
Ihlemann, J
Schumacher, D
机构：
[1] Bulgarian Acad Sci, CLPh, BU-1113 Sofia, Bulgaria
[2] Laser Lab Goettingen EV, D-37077 Gottingen, Germany
来源：
APPLIED SURFACE SCIENCE | 2000年 / 168卷 / 1-4期
关键词：
synthesis of bulk polyimide; laser drilling;
D O I：
10.1016/S0169-4332(00)00578-X
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
A bulk polyimide system prepared by pressing of the precursor monomers 4,4'-oxidianiline (ODA) and 1,2,4,5-benzenetetracarboxylic or pyromellitic dianhydride (PMDA) mixtures has been investigated. The synthesized bulk polyimide is formed as a result of a polycondensation reaction of monomers in solid state phase. A change of the monomers polycrystalline structure to an amorphous one of the bulk polyimide after imidization is established The possibility for excimer laser microstructuring by drilling at various diameters and depths is demonstrated. The scanning electron microscopic observations reveal alterations in the so formed blind holes as a consequence of thr laser action parameters variation. The changes observed and the dependencies obtained are discussed. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：162 / 165
页数：4
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