UNRAVELING THE VISCOSITY-MEDIATED COUPLING EFFECT IN BIOMIMETIC HAIR SENSOR ARRAYS

被引：0
|
作者：
Jaganatharaja, R. K. [1 ]
Droogendijk, H. [1 ]
Vats, S. [1 ]
Hagedoorn, B. [1 ]
Bruinink, C. M. [1 ]
Krijnen, G. [1 ]
机构：
[1] Univ Twente, NL-7500 AE Enschede, Netherlands
来源：
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2011年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A dedicated microfabricated chip consisting of artificial hair sensors was realized and used to controllably and reliably investigate viscous coupling between the hair sensors. The experimental results confirm the presence of coupling effects between hair sensors when placed too close to each other. The results present significant insights in optimal array arrangements for high spatial resolution by preservation of the hair-sensors uncoupled (individual) responses.
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页码：652 / 655
页数：4
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