Thermodynamics and kinetics of in situ synthesized In-P melt by the phosphorus injection and its solidification behavior

被引:3
|
作者
Wang, Shujie [1 ,2 ]
Sun, Niefeng [1 ,2 ]
Fu, Lijie [1 ,2 ]
Wang, Yang [1 ,2 ]
Li, ZaoYang [3 ]
Chen, Chunmei [1 ,2 ]
Shao, Huimin [1 ,2 ]
Shi, Yanlei [1 ,2 ]
Li, Xiaolan [1 ,2 ]
Lin, Jiajie [2 ]
Zhou, Xinyu [2 ]
Gao, Peng [2 ]
Ou, Xin [4 ]
Jiang, Jian [1 ,2 ]
Zhang, Xiaodan [1 ,2 ]
Liu, Huisheng [1 ,2 ]
Sun, Tongnian [1 ,2 ]
机构
[1] Hebei Semicond Res Inst, Natl Key Lab ASIC, Shijiazhuang 050051, Hebei, Peoples R China
[2] China Nanhu Acad Elect & Informat Sci, Jiaxing 314051, Peoples R China
[3] Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China
[4] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, 865 Changning Rd, Shanghai 200050, Peoples R China
基金
美国国家科学基金会;
关键词
Indium phosphide; In situ synthesis; Thermodynamic modeling; Kinetics; Semiconductors; Intermetallics; CRYSTAL-GROWTH; PHASE-DIAGRAMS; SYSTEM; PRESSURES; EQUATION; SILICON;
D O I
10.1016/j.jallcom.2022.163900
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In the study, the thermodynamics and kinetics of phosphorus injected into indium melt has been investigated. The partial pressures of the phosphorus gases, P(g), P-2(g) and P-4(g), in equilibrium with the In-P melt with different concentrations is calculated from 1345 to 1700 K. Based on the thermodynamic analysis, the kinetic process of phosphorus injection synthesis has been studied in details, which involves the relationship among the absorption rate, synthesis efficiency, bubble diameter, rising distance of bubble, bubbling rate, injection rate, environmental pressure and melt concentration. The calculated absorption rate is in good agreement with the experimental data. Based on the kinetic analysis, 20 kg InP polycrystals are synthesized in 3 h by optimizing the synthesis parameters. It is found that local indium and phosphorus separation occurs near the bottom of the ingot during solidification from the P-rich melt. The phosphorus depositions present the radioactivity round rod, columnar polyhedron and fibrous characteristics. The formation mechanism of the separation phenomenon is analyzed. Finally, the methods of obtaining stoichiometric and P-rich polycrystals are put forward. (C) 2022 Elsevier B.V. All rights reserved.
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页数:12
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