Development of monolithic PZT microstage for the application of ultra high-density data storage

This paper presents the fabrication and characterizations of a compact PZT actuated microstage with multi degrees of freedom (DOFs). The entire device is fabricated in a symmetrically arrangement from a monolithic PZT plate with a size of 15x15x0.8 mm(3). Displacement amplification mechanisms are integrated in the structure to increase the stroke of PZT - actuators. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 mu m in x- and y-axes and 10 mu m in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.