Crystallization Kinetics of Amorphous Sputtered Nb-Doped TiO2 Thin Films

被引：0
|
作者：
Ngoc Lam Huong Hoang [1 ,2 ]
Hirose, Yasushi [1 ,2 ]
Nakao, Shoichiro [1 ,2 ]
Hasegawa, Tetsuya [1 ,2 ]
机构：
[1] Univ Tokyo, Dept Chem, Bunkyo Ku, Tokyo 1130033, Japan
[2] KAST, Kawasaki, Kanagawa 2130012, Japan
来源：
APPLIED PHYSICS EXPRESS | 2011年 / 4卷 / 10期
关键词：
X-RAY-DIFFRACTION; PHASE-CHANGE; TARGETS; GROWTH;
D O I：
10.1143/APEX.4.105601
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The crystallization kinetics of amorphous sputtered Nb-doped TiO2 (TNO) thin films during isothermal annealing was examined using in situ X-ray diffraction (XRD) measurements. A Johnson-Mehl-Avrami analysis yielded Avrami exponents in the range of 2.0 to 2.7 for TNO films with various oxygen contents, indicating that the crystallization of amorphous TNO films is essentially two-dimensional. The two-dimensional crystal growth is also confirmed by ex situ polarized-light optical microscopic observations of grains, which have much larger lateral sizes than the film thickness. (C) 2011 The Japan Society of Applied Physics
引用
收藏
页数：3
相关论文
共 50 条
  • [1] Crystallization kinetics of amorphous sputtered Nb-doped TiO2 thin films
    Department of Chemistry, University of Tokyo, Bunkyo, Tokyo 113-0033, Japan
    不详
    Appl. Phys. Express, 10
  • [2] Nb-doped TiO2 thin films for photovoltaic applications
    Potlog, T.
    Dumitriu, P.
    Dobromir, M.
    Manole, A.
    Luca, D.
    MATERIALS & DESIGN, 2015, 85 : 558 - 563
  • [3] Nb-doped TiO2 thin films as photocatalytic materials
    CATALIN ADOMNITEI
    SORIN TASCU
    DUMITRU LUCA
    MARIUS DOBROMIR
    MIHAELA GIRTAN
    DIANA MARDARE
    Bulletin of Materials Science, 2015, 38 : 1259 - 1262
  • [4] Nb-doped TiO2 thin films as photocatalytic materials
    Adomnitei, Catalin
    Tascu, Sorin
    Luca, Dumitru
    Dobromir, Marius
    Girtan, Mihaela
    Mardare, Diana
    BULLETIN OF MATERIALS SCIENCE, 2015, 38 (05) : 1259 - 1262
  • [5] Optical and electrical responses of magnetron-sputtered amorphous Nb-doped TiO2 thin films annealed at low temperature
    Luu Manh Quynh
    Nguyen Thi Tien
    Pham Van Thanh
    Nguyen Minh Hieu
    Sai Cong Doanh
    Nguyen Tran Thuat
    Nguyen Viet Tuyen
    Nguyen Hoang Luong
    Ngoc Lam Huong Hoang
    PHYSICA B-CONDENSED MATTER, 2018, 532 : 200 - 203
  • [6] Structural and vibrational investigations of Nb-doped TiO2 thin films
    Uyanga, E.
    Gibaud, A.
    Daniel, P.
    Sangaa, D.
    Sevjidsuren, G.
    Altantsog, P.
    Beuvier, T.
    Lee, Chih Hao
    Balagurov, A. M.
    MATERIALS RESEARCH BULLETIN, 2014, 60 : 222 - 231
  • [7] Nb-doped TiO2 thin films deposited by spray pyrolysis method
    Adomnitei, C.
    Luca, D.
    Girtan, M.
    Sandu, I.
    Nica, V.
    Sandu, A. V.
    Mardare, D.
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2013, 15 (5-6): : 519 - 522
  • [8] Influence of Experimental Installation on Photocatalytic Activity of Sputtered Nb-Doped TiO2 Thin Film
    Hieu, N. M.
    Lan, N. T.
    Loc, N. B.
    Hang, N. T. T.
    Tien, N. T.
    Thanh, P. V.
    Quynh, L. M.
    Luong, N. H.
    Hoang, N. L. H.
    JOURNAL OF ELECTRONIC MATERIALS, 2017, 46 (06) : 3726 - 3731
  • [9] Transparent conducting Nb-doped anatase TiO2 (TNO) thin films sputtered from various oxide targets
    Yamada, Naoomi
    Hitosugi, Taro
    Kasai, Junpei
    Hoang, Ngoc Lam Huong
    Nakao, Shoichiro
    Hirose, Yasushi
    Shimada, Toshihiro
    Hasegawa, Tetsuya
    THIN SOLID FILMS, 2010, 518 (11) : 3101 - 3104
  • [10] Influence of Experimental Installation on Photocatalytic Activity of Sputtered Nb-Doped TiO2 Thin Film
    N. M. Hieu
    N. T. Lan
    N. B. Loc
    N. T. T. Hang
    N. T. Tien
    P. V. Thanh
    L. M. Quynh
    N. H. Luong
    N. L. H. Hoang
    Journal of Electronic Materials, 2017, 46 : 3726 - 3731
12345