Design and simulation of a micromachined accelerometer

被引：0
|
作者：
Hassan, Hazem [1 ]
Ibrahim, Hassan [1 ]
Elsedawy, Salah [1 ]
机构：
[1] Arab Acad Sci & Technol, Elect & Commun Engn, Cairo, Egypt
来源：
PROCEEDINGS OF THE 6TH WSEAS INTERNATIONAL CONFERENCE ON SYSTEM SCIENCE AND SIMULATION IN ENGINEERING (ICOSSSE '07): SYSTEM SCIENCE AND SIMULATION IN ENGINEERING | 2007年
关键词：
MEMS tunnelling accelerometer; electrostatic; sensing; sensitivity; low spring constant;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The model parameters of the micromachined tunnelling accelerometer have a significant effect on the accelerometer's performance, including its range, bandwidth, sensitivity, accuracy and even the interfacing circuitry. This paper presents the design, simulation and development of a low voltage micromachined tunnelling microaccelerometer and the effects of parameter on the accelerometer's performance. The derivation of the sensing accelerometer model will be discussed. With the use of the MATLAB simulation program, the real world effects of the various parameters are revealed.
引用
收藏
页码：363 / +
页数：2
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