Fluid modelling of the positive column of direct-current glow discharges

被引:38
|
作者
Alves, Luis L. [1 ]
机构
[1] Univ Tecn Lisboa, Ctr Fis Plasmas, Inst Super Tecn, P-1049001 Lisbon, Portugal
来源
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2007年 / 16卷 / 03期
关键词
D O I
10.1088/0963-0252/16/3/015
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
This paper presents a tutorial on the fluid modelling of the positive column of direct-current cylindrical glow discharges. The model writes the continuity and momentum-transfer equations for electrons and ions, coupled with Poisson's equation and the electron mean energy transport equations. The model is solved for helium at pressures p similar or equal to 0.1-10 Torr, gas temperature T-g = 500 K, discharge currents I-dc = 5-200 mA, and tube radius R = 1 cm. The electron transport parameters and rate coefficients are calculated using the local mean energy approximation in articulation with a two-term Boltzmann solver. Model equations are integrated from the discharge axis to the wall, passing through the space-charge sheath and monitoring the charge separation within it. The results obtained allow a systematic characterization of discharge energy deposition and space-charge sheath formation, as a function of pressure and axial current. A general good agreement is found between model results and experimental measurements available in the literature.
引用
收藏
页码:557 / 569
页数:13
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