Degradation of fracture and fatigue properties of MEMS structures under cyclic loading

被引：0

作者：

Kim, JJ ^{[1
]}

Kwon, D ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Mat Sci & Engn, Seoul 151742, South Korea

来源：

Materials, Technology and Reliability of Advanced Interconnects-2005 | 2005年 / 863卷

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The fracture and fatigue properties of LIGA nickel MEMS structures were evaluated by microtensile and fatigue test methods. A microtensile/fatigue device was developed and specimens with feature size ten micrometers were used. The fatigue property was derived from displacement amplitude - the number of cycles to failure curve by applying a dynamic load with a piezoelectric actuator. The tensile/fracture properties after various cyclic loading were also measured. Both fatigue and tensile test results showed a cyclic softening phenomenon.

引用

页码：319 / 324

页数：6

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